IAT-CO2ntroller 2000 GAS INJECTION SYSTEMS
  Theory of Operation :
The IAT-CO2ntroller 2000 is a turnkey, standalone automatic injection system that permits low pressure CO2 utilization/injection into a pressure-regulated line of process DI water. Non-intrusive vortex technology and high purity Teflon materials allow the system to be contaminant-free and resistant to chemical environments. 

The IAT-CO2ntroller 2000 is divided in two individually-controlled systems which monitor and maintain the resistivity of two independent points-of-use by controlling the degradation of the ultrapure water.
The IAT-CO2ntroller 2000 injection system offers three distinct advantages:

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Enhances the processing performance by eliminating static charge buildup on the product.
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PLC-controlled status light tower and audible signals make the IAT-CO2ntroller 2000 series suitable for manufacturing applications.
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User-programmable Digital Controller 770PC and Smart Sensors™ are factory calibrated and do not require recalibration.
INJECT AND CONTROL CO2 LEVEL IN DI WATER
Benefits:  
  • Enhances process performance by eliminating static charge on your substrates… (wafers, photomasks, LCD panels)
  • Reduces Scrap
  • Reduces Particulates
 
Applications:  
  • Brush Scrubbers
  • High Pressure Scrubbers
  • Spin Rinse Dryers
  • DI Water Rinse Tanks (Solvent Tools)
 
Standard Features:    
  • Turn-key, standalone
  • No host intervention
  • User programmable
  • Resistivity monitor & display
  • Non intrusive water flow measurement & display
  • Status light tower & audible signals
  • CE marked elect.components
  • 0.2 micron gas filter
   
PROGRAMMABLE CONTROLLER
Location : Front, center, right/left hand, upper corner controller enclosure. 
Function : Enables user to view DI water resistivity and flow rate readings and to control set points and relay logic of operation. Also enables the flow of CO2 to the Gas Reactor. By default, resistivity readings are displayed in M-cm or k-cm, flow rate is displayed in lpm.
   
   
   
     
SWITCH BUTTONS
  Location : Front, center right/left hand, midway controller enclosure. 
  Function : Enables user to select the operations mode of the system (ON or STANDBY) and to silence audible alarms. 
  ON (green button)
This switch enables the internal PLC to communicate with the 770PC controller to monitor the resistivity and flow setpoints and to provide the user with the overall status of the process via the status light tower. 
  STANDBY (white button)
This switch disables the internal PLC from communicating to and reporting from the 770PC controller. It also disables any audible status signals and energizes the BLUE light in the status light tower. 
Note : The STANDBY mode does not disable the supply of CO2 to the Gas Reactor. This function is controlled and displayed by the 770PC Controller at all times. Only the interruption of Power may disable the functions of the 770PC controller.
  SILENCE (amber button)
This switch disables the warning audible alarm(s) and provides the user a delay of three (3) minutes prior to re-energizing the alarm.
     
STATUS LIGHT TOWER
  Location : Remote (50' signal cable included) 
  Function : Provides user with system status.
  BLUE LIGHT (STANDBY)
This state indicates that the system status report is temporarily off line. The state is achieved by depressing the Standby (white) button on the CO2ntroller 2000 console. 
(No audible alarm is emitted during this state.
  GREEN LIGHT (ALL SYSTEMS OK)
This state indicates that the specified parameters and values for DI flow and resistivity are under the specified limits. No audible alarm is emitted during this state. 
  AMBER LIGHT (SYSTEM WARNING)
This state warns the operator when:
a) The specified DI flow rate value for Normal operations is not met immediately after depressing the ON (green) button on the CO2ntroller 2000 console. This indicates that the DI water flow demand is not sufficient to switch to Normal CO2 flow, thus, no audible alarm is emitted during this instance. Depending on the settings for the Idle CO2 flow rate, the Resistivity normal setpoint may be met during this instance. 
The specified DI flow rate value for Normal operations is met and the resistivity normal setpoint is not met within 3 seconds thereafter. This means that the CO2 supply pressure may not be sufficient to operate normally. An intermittent (----) audible alarm is emitted during this state.
  RED (SYSTEM ALERT)
This state can only be achieved when during a GREEN (ALL SYSTEMS OK) state there is a sudden loss of CO2 pressure which prompts the resistivity to rise above the specified maximum limit. A continuous (Â) audible alarm is emitted during this state. If the SILENCE (amber) button on the CO2ntroller 2000 console is depressed, the light status will default to a WARNING (amber) condition which will prompt an intermittent (---) audible signal after a 3 minute delay. 
 
Note : Either a WARNING (amber) or ALARM (red) condition is not suitable to process product through the tool set. 
     
AUDIBLE SIGNALS
Location : Front, center left/ right hand, midway controller enclosure. 
Function : Provides user with multi-tone audible signals should the system engage an alarm or warning status. 
Intermittent (- - -) 88 dB @ 10 feet
This audible warning signal is only energized during a type-B warning condition, thus, is interlocked with the Light Tower AMBER status light. If the SILENCE button is depressed while the signal is energized, the intermittent (---) signal will resume after a 3 minute delay. 
Continuous ( Â ) 88 dB @ 10 feet
This audible alert signal can only be energized during an ALERT (Red) condition. If the SILENCE button is depressed, the audible signal will default to an WARNING (amber) condition which will default to an intermittent (---) audible signal with a 3 minute delay. 
 
GAS FLOW METERS
Location : Front, center left/ right hand, lower controller enclosure. 
Function : Enables a metered amount of CO2 into the gas flow line. 
Idle Flow (100 cc/min -9 L/min)
These gas flow meters enable a constant purge of CO2 through the gas reactor flow loop (during Standby mode or when the DI water flow setpoint is not reached) in order to prevent stagnation of the solution in the flow line. The idle flow On/Off time is controlled by the 770PC controller and does not require the operator's intervention. 
Normal flow (150-1000 cc/min)
These gas flow meters maintain a metered amount of CO2, through the gas reactor flow loop in order to maintain the desired Resistivity setpoint. The Normal flow is automatically controlled by the 770PC controller and does not require the operator's intervention. 
Note : A predetermined amount of gas can be manually set at the metering valve built in the flow meter.
 
GAS REACTOR
Location : In-line with the DI water flow line. 
  Function : This device is a key component in the injection of the CO2 in the DI water line. The low pressure gas is effectively mixed in the water by the use of a two stage injection design built in the gas reactor.
Specifications :

Material : Virgin PTFE (Teflon™) 
Overall dimensions : 2.5" OD X 6.0" L 
Inlet/Outlet (DI water) : ½" Flaretek 
Inlet connection (Gas) : 1/8" FNPT 
Max Op pressure (DI Water) : 40 PSI 
Max Op pressure (Gas) : 40 PSI 
Seals : Virgin PTFE (Teflon™) 

Note : The device seals are dynamically loaded from the factory, thus integrity may be jeopardized and warranty will be voided if opened or dismantled.
 
VORTEX METER
Location : In-line with the DI water flow. 
Function : This device measures the flow of DI water being delivered to the point-of-use and enables the 770PC controller to calculate the pre-determined mixture of CO2 in the DI water line required to maintain the Resistivity setpoint. 
  Specifications :

Material : PVDF (Kynar™) 
Overall dimensions : 2.0" OD X 4.87" L 
Inlet/Outlet (DI water) : ½" Flaretek 
Max Op pressure (DI Water) : 150 PSI 
Temp range : 5 - 95 C° 
Flow rates range : 2.3 - 18.9 SLPM 
Accuracy ± 0.75 % of span 

Note : This device is furnished with Smart Sensors™ connections and does not require calibration. DO NOT sever or disassemble the connections as the NVRAM chip may be exposed, voiding the warranty.
 
RESISTIVITY PROBE
Location : In-line with the DI water RETURN flow line. 
  Function : This device measures the Resistivity of the DI water and transmits the values to the 770PC controller for further processing.
Specifications :

Electrode : PFA (Teflon™) coated titanium 
Overall dimensions : 1.0" OD X 2.0" L 
Inlet / Outlet (DI water) : ½" Flaretek 
Max Op pressure (DI Water) : 60 PSI 
Temp range : 5 - 95 C° 
Resistivity range : 500 W.cm - 90 MW.cm2 
Accuracy ± 1 % 
Repeatability ± 0.25 % 

Note : This device is furnished with Smart Sensors™ connections and does not require calibration. DO NOT sever or disassemble the connections as the NVRAM chip may be exposed, voiding the warranty. 
     
  Year 2000 Certification : 
    IAT certifies that the electronic components integrated in the IAT-CO2ntroller 2000 passed the Sematech Version 2.01 test for Y2K indicating software and hardware compliance to the next millennium.
     
353 Main Street Pennsburg, PA 18073


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